TY - JOUR
T1 - Modeling the Lateral Wet Oxidation of AlxGa1-xAs into Arbitrary Mesa Geometries
AU - Alfaro-Bittner, K.
AU - Rojas, R. G.
AU - Lafleur, G.
AU - Calvez, S.
AU - Almuneau, G.
AU - Clerc, M. G.
AU - Barbay, S.
N1 - Funding Information:
M.G.C. and R.G.R. acknowledge the financial support of FONDECYT projects Grants No. 1180903 and No. 1130622, respectively. K.A.-B. is supported by CONICYT, scholarship Beca Doctorado 2014 Nacional No. 21140668. G.L., S.C., and G.A. acknowledge the support by the LAAS-CNRS micro- and nanotechnologies platform, a member of the French RENATECH network, and by the University Paul Sabatier for G.L.’s Ph.D. scholarship.
Publisher Copyright:
© 2019 American Physical Society.
PY - 2019/4/22
Y1 - 2019/4/22
N2 - We report experimental and theoretical results on the lateral wet oxidation of bidimensional thin aluminum-rich layers into AlOx. We introduce a reaction-diffusion model of oxidation front propagation that includes effects of anisotropies and compare it to experimental results. This model can be used with any starting geometry, possibly nonconvex, and is deduced from the chemical reactions of wet oxidation of AlxGa1-xAs -based layers. Numerical simulations performed with simple and complex geometries are in excellent agreement with the experimental observations. Our method is general and can apply to other oxides. It opens the way to the fine control of wet-oxidation fronts and to the formation of AlOx layers with a desired geometry that has numerous practical and relevant applications for, e.g., waveguiding or carrier confinement in photonics.
AB - We report experimental and theoretical results on the lateral wet oxidation of bidimensional thin aluminum-rich layers into AlOx. We introduce a reaction-diffusion model of oxidation front propagation that includes effects of anisotropies and compare it to experimental results. This model can be used with any starting geometry, possibly nonconvex, and is deduced from the chemical reactions of wet oxidation of AlxGa1-xAs -based layers. Numerical simulations performed with simple and complex geometries are in excellent agreement with the experimental observations. Our method is general and can apply to other oxides. It opens the way to the fine control of wet-oxidation fronts and to the formation of AlOx layers with a desired geometry that has numerous practical and relevant applications for, e.g., waveguiding or carrier confinement in photonics.
UR - http://www.scopus.com/inward/record.url?scp=85064868114&partnerID=8YFLogxK
U2 - 10.1103/PhysRevApplied.11.044067
DO - 10.1103/PhysRevApplied.11.044067
M3 - Article
AN - SCOPUS:85064868114
VL - 11
JO - Physical Review Applied
JF - Physical Review Applied
SN - 2331-7019
IS - 4
M1 - 044067
ER -