Molybdenum trioxide thin films doped with gold nanoparticles grown by a sequential methodology: Photochemical Metal-Organic Deposition (PMOD) and DC-magnetron sputtering

C. Castillo, G. Buono-Core, C. Manzur, N. Yutronic, R. Sierpe, G. Cabello, B. Chornik

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

Gold nanoparticles (AuNPs) were deposited by DC-magnetron sputtering onto molybdenum trioxide (MoO3) thin films grown by Photochemical Metal-Organic Deposition (PMOD) on Si(100) and borosilicate glass substrates. The chemical, optical and morphology properties of the films were studied by UV/Vis Spectroscopy, Scanning Electron Microscopy (SEM), X-Ray Photoelectron Spectroscopy (XPS), and X-Ray Diffraction (XRD). SEM revealed that AuNPs formed after 5 s of sputtering. AuNPs are spherical and have both an average diameter of 18 nm and a relatively narrow size distribution. As the deposition time increases, larger structures are formed by an aggregation of AuNPs. XPS studies of the AuNP/MoO3 films on Si(100) showed the presence of Mo(VI) and Mo(V), which indicated that the films were primarily non-stoichiometric molybdenum oxides. The occurrence of oxygen vacancies in the substrate play an important role to stabilize the AuNPs.

Original languageEnglish
Pages (from-to)2816-2820
Number of pages5
JournalJournal of the Chilean Chemical Society
Volume61
Issue number1
DOIs
StatePublished - 2016
Externally publishedYes

Keywords

  • A. nanostructures
  • A. oxides
  • A. thin films
  • B. sputtering
  • C. photoelectron spectroscopy
  • C. x-ray diffraction

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