Synthesis and characterization of thin molybdenum oxide films prepared from molybdenum dioxo tropolonate precursors by photochemical metal-organic deposition (PMOD) and its evaluation as ammonia gas sensors

G. E. Buono-Core, A. H. Klahn, C. Castillo, EDUARDO CARLO MUÑOZ CARTAGENA, C. Manzur, G. Cabello, B. Chornik

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

Abstract

Amorphous non-stoichiometric molybdenum oxide thin films have been successfully prepared by direct UV irradiation of amorphous films of molybdenum dioxo tropolonate complexes on Si(100) substrates. Photodeposited films were characterized by X-ray photoelectron spectroscopy (XPS) and the surface morphology examined by Atomic Force Microscopy (AFM). It was found that as-photodeposited films are uniform with rms surface roughness of 231 nm and contain non-stoichiometric oxides (MoO3 - x). The results of XRD analysis showed that post-annealing of the films in air at 350 C transforms the sub-oxides to α-MoO3 phase with a much smoother surface morphology (rms = 164 nm). Both, the as-photodeposited and annealed MoO 3 - x films exhibit good optical quality with transparency in the visible region better than 80%. Gas sensing tests reveal that annealed MoO 3 - x films exhibit a better response than as-deposited films towards 50 ppm ammonia at an operating temperature of 350°C.

Original languageEnglish
Pages (from-to)21-27
Number of pages7
JournalJournal of Non-Crystalline Solids
Volume387
DOIs
StatePublished - 1 Mar 2014
Externally publishedYes

Keywords

  • Gas sensors
  • Molybdenum oxides
  • Photochemical deposition
  • Thin films
  • XPS

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