Synthesis and evaluation of bis-β-diketonate dioxotungsten(VI) complexes as precursors for the photodeposition of WO3 films

G. E. Buono-Core, A. H. Klahn, C. Castillo, M. J. Bustamante, EDUARDO CARLO MUÑOZ CARTAGENA, G. Cabello, B. Chornik

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18 Scopus citations

Abstract

In this paper non-stoichiometric tungsten oxide thin films have been successfully prepared by direct UV irradiation of bis-β-diketonate dioxotungsten(VI) precursor complexes spin-coated Si(1 0 0) substrates. Photodeposited films were characterized by Fourier transform-infrared spectroscopy (FT-IR), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) and the surface morphology examined by Atomic Force Microscopy (AFM). The results of XRD analysis showed that the as-photodeposited WO 3-x films are amorphous and have a rougher surface than thermally treated films. Post-annealing of the films in air at 500 °C transforms the sub-oxides to a monoclinic WO3 phase.

Original languageEnglish
Pages (from-to)201-206
Number of pages6
JournalPolyhedron
Volume30
Issue number1
DOIs
StatePublished - 12 Jan 2011
Externally publishedYes

Keywords

  • Photochemical deposition
  • Thin films
  • Tungsten oxides

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